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Temperature and humidity control in clean rooms
Temperature and humidity control in clean roomsThe temperature and humidity of the clean space are mainly determined based on the process requirements, but under the condition that the process requirements are met, human comfort should be taken into consideration. With the improvement of air cleanliness requirements, there is a trend that the process requirements for temperature and humidity are becoming more and more stringent.The temperature requirements of the specific process will be listed later, but as a general principle, as the processing accuracy becomes more and more precise, the requirements for the temperature fluctuation range are getting smaller and smaller. For example, in the photolithography exposure process of large-scale integrated circuit production, the difference in thermal expansion coefficient between glass and silicon wafers used as mask materials is required to be smaller and smaller. |
