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Introduction to Cleanroom Temperature, Humidity and Pressure
Introduction to Cleanroom Temperature, Humidity and Pressure1. About the temperatureIt is important to effectively control the temperature in the cleanroom from both comfort and process recommendations. In ISO Class 7 (Class 10,000) or ISO Class 6 (Class 1,000) laboratories, the temperature in the clean room is maintained at about 22°±2°C, and staff comfort in overalls is optimal. In more stringent cleanrooms where full clean suits are recommended, a temperature of 18°±2°C is optimal. Buildings that are not designed to be used as cleanrooms may not be completely isolated from their surroundings. Most of these buildings have windows, and during the day, heat will always enter and leave the cleanroom through the windows, which can adversely affect the operation of experiments in the cleanroom. Therefore, care must be taken to prevent the laboratory from being affected by changes in the temperature of external heat sources. 2. Humidity Many of the issues concerning cleanroom temperature control also apply to humidity control. Confirmation values and errors should be in line with the actual needs of the application. If the temperature is maintained at the optimum level, the relative humidity (RH) in the range of 30-65% will feel more appropriate. Where recommendations are made to achieve narrower humidity tolerances, these are generally process recommendations only. For existing buildings, increased control of cleanroom humidity can mean significant costs. In dry areas, the cost of freshness is high. And in humid areas, dehumidification is required. In most areas, if the proposed RH error of ± 5%, the freshness of the equipment and dehumidification equipment are to be integrated into the mechanical system. 3. About pressure Control of the pressure difference between the clean space and the non-clean space is not a difficult task. However, if the clean room sandwich wall or spring morning shaft is composed of existing building walls or prefabricated panels, then they may not be able to withstand any pressure. All such spaces need to be adequately sealed. Most often, the highest pressures are found in the tightest clean spaces, which are typically 0.02 inches of water column higher than surrounding spaces with lower cleanliness recommendations, and 0.05 inches of water column higher than neighboring non-clean spaces. A cleanroom with biocontainment protection has a lower indoor pressure than that of the surrounding adjacent space while ensuring that the cleanroom space is airtight and inaccessible to contaminants. "Dividing a room within the cleanroom" is also a viable option. In addition, a "single-passage" configuration can be used. This type of room should be as small as possible to fulfill the disposal recommendations. |
