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Introduction to cleanroom composite airflow characteristics
Introduction to cleanroom composite airflow characteristicsThe composite type is a combination or merging of turbulent and laminar flows that can provide localized ultra-clean air.(1) Clean tunnel: The use of HEPA or ULPA filters for 100% coverage of the process area or work area can increase the cleanliness to more than 10, thus allowing savings in installation and operating costs. This type requires the operator's work area to be isolated from the product and machine maintenance to avoid disruption to work and quality during machine maintenance. This type is mainly used in ULSI processes. The clean tunnel has two other advantages: A. Flexible expansion is easy; B. Maintenance of the machine can be easily carried out in the maintenance area. (2) Clean tube: encloses and purifies the automatic line through which the product is processed and increases the cleanliness to above 100. Since the product is isolated from the operator and the dust-generating environment, a small amount of air can be used to obtain a good level of cleanliness, which can save energy, with the least amount of manual labor required for automated lines. Suitable for the pharmaceutical, food, and semiconductor industries. (3) Combined partial clean room (Clean Spot): Increases the cleanliness level of the product processing area in a turbulent clean room from 10,000 to 100,000 to 10 to 1,000 or higher; clean benches, clean work sheds, and clean air cabinets fall into this category. Clean benches: levels 1 to 100. Clean shed: To enclose a small space within a turbulent clean room space with anti-static clear plastic sheeting, use a separate HEPA or ULPA and air-conditioned blower unit as a higher level clean space, class 10 to 1,000, height approx. 2.5m, footprint less than 10m², available with four columns and additional removable wheels for increased flexibility. |
