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How are cleanrooms in the semiconductor industry designed and planned?
How are cleanrooms in the semiconductor industry designed and planned?I. Docking work of information1. Docking of basic building information Including understanding the size of each floor of the plant area, height, with or without load-bearing columns, entrances and exits, and other information, but also need to understand the plant's existing cleanliness level. 2. Docking production line and production process information Understand the production equipment, workstations, production line size, and placement; production of raw materials, semi-finished products, and finished products placed in the location and footprint needs; clear access to people and goods, working area, the number of operators required in the workshop, and other needs. 3. Define the enterprise's later production planning information and budget cost information. Understand in advance the planning of enterprise R & D production, to prepare in advance, and reserve suitable space for upgrading and transformation in the later stage; clarify the enterprise decoration design budget, and carry out design planning within a reasonable range. II. Design planning Generally speaking, the semiconductor clean room on the clean level requirements are higher, and the construction difficulty also increases. Need to be based on indoor temperature and humidity, production line cleanliness required, differential pressure exhaust, illumination air volume, and other data for reasonable design. Such as static electricity on the semiconductor industry products have a greater impact, will reduce the yield rate, and a dry environment is prone to static electricity, so the semiconductor industry clean room needs to be reasonable control of temperature and humidity, usually set the temperature at 22 ℃ or so, the relative humidity is controlled in the range of 50% -60%, which can effectively prevent the generation of static electricity, and at the same time enhance the suitability of staff. |
