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FFU air purification and environmental protection equipment

FFU air purification and environmental protection equipment

FFU environmental protection equipment is a combination of fans and filters, also known as "self-fan filtration equipment", this environmental protection equipment is usually installed at the end of the air supply of the clean room and is usually placed on the suspended "dry" gasket sealed keel frame. This environmental protection equipment is usually installed at the end of the air supply of the clean room and is usually placed on the suspended "dry" gasket sealing keel frame. The upper part of the FFU is divided into the fan module, and the lower part is divided into the filter. According to the cleanliness requirements, the filters can be divided into different levels of high-efficiency or ultra-high-efficiency filters to provide clean air for the clean room. Fan module in addition to overcoming the resistance of the FFU under the part of high-efficiency filters, also overcomes the entire circulating wind of all the channel components of all the resistance, to maintain a set operating airspeed.FFU system has a simple design and construction, air speed adjustment flexibility, clean area is easy to change, and so on, and therefore has become one of the popular forms of industrial cleanroom system.


  FFU has characteristics:


  I: to have flexibility. Because FFU is self-powered, it is not subject to geographical restrictions. In a large clean room, it can be controlled in zones as needed. Moreover, along with the changes in the semiconductor production process, the layout of the plant must be adjusted accordingly, its flexibility to make such adjustments easy, and will not bring secondary investment.


  II: reusability. Theoretically, a moment without using the FFU equipment can be disassembled, sealed, properly stored, and saved for the next time.


  III: Negative pressure ventilation. This is a special feature of FFU equipment. Because it can provide static pressure the air supply static pressure box relative to the clean plant is negative pressure. Therefore, the particles in the static pressure box will not be subjected to pressure to leak into the clean area, making the sealing easy and safe.


  IV: Shorten the construction cycle. The use of equipment eliminates the production and installation of air ducts, because air ducts in the clean project, have accounted for a large part of the construction cycle.


  V: Reduce the cost of operation. Although in the choice of FFU equipment, the initial investment is higher than the use of air duct ventilation, in the later operation, can be completely outstanding performance of energy saving, maintenance-free, and other advantages.