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Considerations in laboratory design
Considerations in laboratory designThe return air volume of each ultra-clean laboratory room should be designed according to the different environments of 10,000, 1,000, and 100 levels, and the indoor airflow organization adopts the way of top-down air supply (top-down laminar air supply in the 100-layer area). The air supply is sent to the indoor area after being filtered by the terminal high-efficiency filter, and the return air is returned to the air-conditioning unit through the side-wall outlet. Also, consider the return air filter material. Return air ducts should prevent acid and alkali corrosion, especially hydrofluoric acid corrosion.The design of the ultra-clean laboratory should consider the cabinet exhaust, indoor air leakage, and fresh air supplementation to meet indoor environmental requirements. The entrance to the changing room and the entrance to the comprehensive analysis room can be closed automatically. The ultra-clean laboratory should be reserved for equipment doors, all indoor doors should be considered for the entrance and exit of equipment. The outdoor fresh air of the ultra-clean room entering the room needs to be filtered through coarse, medium, sub-high efficiency, and high efficiency, and a filter is installed at the outlet of the fresh air to prevent debris from entering; the supplemental air volume of the ultra-clean laboratory should give full consideration to the maximum exhaust volume of each cabinet of the clean room and the leakage of the doorway, to ensure the positive-pressure operation of the clean room and to prevent the cross-pollution of the dust. In the design of the ultra-clean laboratory fan, the primary and secondary filtration devices should be considered as a backup design for replacement and start-up in the event of failure. The dehumidification effect of the air-conditioning unit must reach 50% RH in summer. Water, electricity, gas, air, temperature, humidity, differential pressure, and other parameters in the ultra-clean laboratory can be monitored and adjusted through the operating panel. The operation panel should be set in an area of the laboratory that is easy to operate and monitor. Data such as wind speed, air volume, differential pressure, temperature, and humidity can be recorded automatically and saved and uploaded to the laboratory management system. All pipelines and air-conditioning units in the laboratory should be designed with additional vibration-damping devices and measures to avoid vibration and noise during operation and to reduce the impact of the operating environment on instruments and personnel. The static pressure difference between different levels of clean areas in the ultra-clean laboratory is not less than 15 Pa, and the static pressure difference between clean and non-clean areas is not less than 10 Pa. |
